4N BF3 Electronic Grade Boron Trifluoride Gas is essential for ion implantation in semiconductor manufacturing. With 99.99% purity, it ensures precise doping and minimal contamination, enhancing chip performance and reliability. This high-purity gas is critical for advanced electronic applications, ensuring consistent and efficient production processes.
| Parameter | Unit | High-purity grade Specification | Measured value |
| BF3 Purity | % | ≧99.99 | 99.995 |
| Oxygen (02) | ppm | ≤ 5.0 | 2.1 |
| Nitrogen (N2) | ppm | ≤ 40.0 | 3 |
| Carbon dioxide (CO2) | ppm | ≤10.0 | 1.4 |
| Carbon Monoxide (CO) | ppm | ≤25.0 | 2.1 |
| Sulfur Dioxide (SO2) | ppm | ≤10.0 | 1.8 |
| Methane (CH4) | ppm | ≤2.0 | 0.4 |
| Silicon tetrafluoride (SiF4) | ppm | ≤4.0 | 0.1 |
| Sulfate | ppm | ≤4.0 | 0.1 |
In recent years, the company has undertaken the combination of independent research and industry-university-research institutions’ collaborative innovation, has built innovation platforms such as High-abundance Boron Isotope Engineering Research Center of petroleum and chemical industry and Shandong Enterprise Technology Center, and has established joint laboratories with the Chinese Academy of Sciences to continuously promote the transformation and upgrading of industries and products towards high-end and high-value direction.
The production as well as the quality of 4N, 5N BF3 gas for electronic use has been in a very stable and state. We have started to export them to foreign countries regularly for high end use.
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Shengtuo Chemical Industry Park, Kenli District, Dongying City, Shandong Province
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