The high purity Boron Trifluoride gas is widely used for diffusion in silicon and ion implantation. It is one of the indispensable special gases for the semiconductor industry. in the fabrication of integrated circuits and microchips. As dopant , it enables the precise doping of silicon wafers, and imparting the excellent electrical properties to semiconductor devices.
Heyi has high purity Boron Trifluoride gas for the electronic uses and also has started the supply of Boron Trifluoride B11, the enriched grade for higher requirements. All the solutions are centered on the needs and development of the semiconductor industry.
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